Advanced Silicon Carbide Devices And Processing Ed. By Stephen E. Saddow And Francesco La Via
by Francesco La Via / 2015 / English / PDF

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Authors organized this book to bring to the attention of those well versed in SiC technology some new developments in the field with a particular emphasis on particularly promising technologies such as SiC-based solar cells and optoelectronics. Given the importance of advanced microsystems and sensors based on SiC, a review on 3C-SiC for both microsystem and electronic applications also included. Preface 1 Silicon Carbide in Microsystem Technology — Thin Film Versus Bulk Material 2 3C-SiC — From Electronic to MEMS Devices 3 Impact of Dielectric Formation and Processing Techniques on the Operation of 4H-SiC MOSFETs 4 Investigation of SiC/Oxide Interface Structures by Spectroscopic Ellipsometry 5 Comparative Study of Optimally Designed DC-DC Converters with SiC and Si Power Devices 6 Novel Developments and Challenges for the SiC Power Devices 7 High-responsivity SiC Ultraviolet Photodetectors with SiO2 and Al2O3 Films 8 Silicon Carbide for Novel Quantum Technology Devices