Handbook Of Semiconductor Silicon Technology (materials Science And Process Technology)
by William C. O'Mara /
1990 / English / PDF
8.9 MB Download
This handbook is a comprehensive summary of the science, technology
and manufacturing of semiconductor silicon materials. Every known
property of silicon is detailed. A complete set of binary phase
diagrams is included. Practical aspects such as materials handling,
safety, impurity and defect reduction are also discussed in
depth.
This handbook is a comprehensive summary of the science, technology
and manufacturing of semiconductor silicon materials. Every known
property of silicon is detailed. A complete set of binary phase
diagrams is included. Practical aspects such as materials handling,
safety, impurity and defect reduction are also discussed in
depth.
Fundamentals in the areas of silicon precursor compounds,
polysilicon, silicon crystal growth, wafer fabrication, epitaxial
and CVD deposition are addressed by experts in these fields.
Materials properties covered include electrical, optical and
mechanical properties, deep level impurities and carrier lifetime,
and thermochemistry, as well as specific sections on oxygen,
carbon, and nitrogen impurities. The book contains an extensive set
of references, tables of materials constants, and silicon
properties, and a presentation on the state of the art of materials
manufacturing.
Fundamentals in the areas of silicon precursor compounds,
polysilicon, silicon crystal growth, wafer fabrication, epitaxial
and CVD deposition are addressed by experts in these fields.
Materials properties covered include electrical, optical and
mechanical properties, deep level impurities and carrier lifetime,
and thermochemistry, as well as specific sections on oxygen,
carbon, and nitrogen impurities. The book contains an extensive set
of references, tables of materials constants, and silicon
properties, and a presentation on the state of the art of materials
manufacturing.
