Microlithography: Science And Technology, Second Edition (opitcal Science And Engineering)
by Bruce W. Smith /
2007 / English / PDF
15.3 MB Download
This new edition of the bestselling
This new edition of the bestsellingMicrolithography:
Science and Technology
Microlithography:
Science and Technology provides a balanced treatment of
theoretical and operational considerations, from elementary
concepts to advanced aspects of modern submicron microlithography.
Each chapter reflects the current research and practices from the
world's leading academic and industrial laboratories detailed by a
stellar panel of international experts.
provides a balanced treatment of
theoretical and operational considerations, from elementary
concepts to advanced aspects of modern submicron microlithography.
Each chapter reflects the current research and practices from the
world's leading academic and industrial laboratories detailed by a
stellar panel of international experts.New in the Second Edition
New in the Second EditionIn addition to
updated information on existing material, this new edition features
coverage of technologies developed over the last decade since the
first edition appeared, including:
In addition to
updated information on existing material, this new edition features
coverage of technologies developed over the last decade since the
first edition appeared, including:Immersion Lithography
Immersion Lithography157nm Lithography
157nm LithographyElectron Projection Lithography (EPL)
Electron Projection Lithography (EPL)Extreme Ultraviolet (EUV) Lithography
Extreme Ultraviolet (EUV) LithographyImprint Lithography
Imprint LithographyPhotoresists for 193nm and Immersion Lithography
Photoresists for 193nm and Immersion LithographyScatterometry
ScatterometryMicrolithography: Science and Technology, Second
Edition
Microlithography: Science and Technology, Second
Edition authoritatively covers the physics, chemistry,
optics, metrology tools and techniques, resist processing and
materials, and fabrication methods involved in the latest
generations of microlithography such as immersion lithography and
extreme ultraviolet (EUV) lithography. It also looks ahead to the
possible future systems and technologies that will bring the next
generations to fruition.
authoritatively covers the physics, chemistry,
optics, metrology tools and techniques, resist processing and
materials, and fabrication methods involved in the latest
generations of microlithography such as immersion lithography and
extreme ultraviolet (EUV) lithography. It also looks ahead to the
possible future systems and technologies that will bring the next
generations to fruition.
Loaded with illustrations, equations, tables, and time-saving
references to the most current literature, this book is the most
comprehensive and reliable source for anyone, from student to
seasoned professional, looking to achieve robust, accurate, and
cost-effective microlithography processes and systems.
Loaded with illustrations, equations, tables, and time-saving
references to the most current literature, this book is the most
comprehensive and reliable source for anyone, from student to
seasoned professional, looking to achieve robust, accurate, and
cost-effective microlithography processes and systems.
