Fib Nanostructures (lecture Notes In Nanoscale Science And Technology)
by Zhiming M. Wang /
2014 / English / PDF
22.8 MB Download
FIB Nanostructures
FIB Nanostructures reviews a range of methods,
including milling, etching, deposition, and implantation, applied
to manipulate structures at the nanoscale. Focused Ion Beam (FIB)
is an important tool for manipulating the structure of materials
at the nanoscale, and substantially extends the range of possible
applications of nanofabrication. FIB techniques are widely used
in the semiconductor industry and in materials research for
deposition and ablation, including the fabrication of
nanostructures such as nanowires, nanotubes, nanoneedles,
graphene sheets, quantum dots, etc. The main objective of this
book is to create a platform for knowledge sharing and
dissemination of the latest advances in novel areas of FIB for
nanostructures and related materials and devices, and to provide
a comprehensive introduction to the field and directions for
further research. Chapters written by leading scientists
throughout the world create a fundamental bridge between focused
ion beam and nanotechnology that is intended to stimulate
readers' interest in developing new types of nanostructures for
application to semiconductor technology. These applications are
increasingly important for the future development of materials
science, energy technology, and electronic devices. The book can
be recommended for physics, electrical engineering, and materials
science departments as a reference on materials science and
device design.
reviews a range of methods,
including milling, etching, deposition, and implantation, applied
to manipulate structures at the nanoscale. Focused Ion Beam (FIB)
is an important tool for manipulating the structure of materials
at the nanoscale, and substantially extends the range of possible
applications of nanofabrication. FIB techniques are widely used
in the semiconductor industry and in materials research for
deposition and ablation, including the fabrication of
nanostructures such as nanowires, nanotubes, nanoneedles,
graphene sheets, quantum dots, etc. The main objective of this
book is to create a platform for knowledge sharing and
dissemination of the latest advances in novel areas of FIB for
nanostructures and related materials and devices, and to provide
a comprehensive introduction to the field and directions for
further research. Chapters written by leading scientists
throughout the world create a fundamental bridge between focused
ion beam and nanotechnology that is intended to stimulate
readers' interest in developing new types of nanostructures for
application to semiconductor technology. These applications are
increasingly important for the future development of materials
science, energy technology, and electronic devices. The book can
be recommended for physics, electrical engineering, and materials
science departments as a reference on materials science and
device design.