Handbook Of Surface And Nanometrology
by David J. Whitehouse /
2013 / English / PDF
47.8 MB Download
The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained with numerous practical examples.